Albert D. Richards

Continuum modeling of argon radio frequency glow discharges

Albert D. Richards, Brian E. Thompson, Herbert H. Sawin · Applied Physics Letters · 1987 · 210 citations

Engineering, Glow Discharge, Plasma Science +16

Ion bombardment energy distributions in radio-frequency glow-discharge systems

Brian E. Thompson, Kenneth D. Allen, Albert D. Richards et al. · Journal of Applied Physics · 1986 · 108 citations

Sampling Orifice, Electrical Engineering, Engineering +14

Atomic chlorine concentration measurements in a plasma etching reactor. I. A comparison of infrared absorption and optical emission actinometry

Albert D. Richards, Brian E. Thompson, Kenneth D. Allen et al. · Journal of Applied Physics · 1987 · 63 citations

Engineering, Atomic Emission Spectroscopy, Absorption Spectroscopy +20

Atomic chlorine concentration and gas temperature measurements in a plasma etching reactor

J. Wormhoudt, Alan C. Stanton, Albert D. Richards et al. · Journal of Applied Physics · 1987 · 46 citations

Chemical Engineering, Engineering, Diode Laser Absorption +15

Atomic chlorine concentration measurements in a plasma etching reactor. II. A simple predictive model

Albert D. Richards, Herbert H. Sawin · Journal of Applied Physics · 1987 · 28 citations

Chemical Engineering, Engineering, Environmental Engineering +9