Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1987 · 18 citations · 12 references
Natural SciencesMaterials SciencePhysicsMaterials PhysicsMetallurgySolid State PhysicsCrystal GrowthCrystal LatticeCrystalline MaterialsDopingElemental ImpuritiesMetalsAluminium AlloysAluminum-containing AlloysImplantation-induced Defect FormationImpuritiesImpurity DefectsImpurity IncorporationIn-situ Doping
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