Structural and optical modification in hafnium oxide thin films related to the momentum parameter transferred by ion beam assistance

Review of advances in cubic boron nitride film synthesis

Paul B. Mirkarimi, Kevin F. McCarty, Douglas L. Medlin · Materials Science and Engineering R Reports · 1997 · 637 citations

Natural Sciences, Materials Engineering, Materials Science +9

An intrinsic stress scaling law for polycrystalline thin films prepared by ion beam sputtering

H. Windischmann · Journal of Applied Physics · 1987 · 401 citations

Natural Sciences, Materials Engineering, Materials Science +16

Phase control of cubic boron nitride thin films

Daniel J. Kester, R. Messier · Journal of Applied Physics · 1992 · 352 citations

Natural Sciences, Materials Science, Physics +12

Modification of the optical and structural properties of dielectric ZrO2 films by ion-assisted deposition

Philip Martin, R. P. Netterfield, W. G. Sainty · Journal of Applied Physics · 1984 · 242 citations

Natural Sciences, Materials Engineering, Materials Science +17

On the role of ions in the formation of cubic boron nitride films by ion-assisted deposition

Paul B. Mirkarimi, Kevin F. McCarty, Douglas L. Medlin et al. · Journal of materials research/Pratt's guide to venture capital sources · 1994 · 200 citations

Natural Sciences, Materials Engineering, Materials Science +11