Publication | Closed Access
On the role of ions in the formation of cubic boron nitride films by ion-assisted deposition
200
Citations
49
References
1994
Year
Materials ScienceCubic BoronBoron NitrideEngineeringHexagonal Boron NitrideIon-assisted DepositionCubic Boron NitrideSurface ScienceApplied PhysicsChemistryThin FilmsChemical Vapor DepositionBorophene
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