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A comparative micro-cantilever study of the mechanical behavior of silicon based passivation films

EngineeringFlexible ElectronicsMechanical BehaviorMicrofabricationMechanical EngineeringApplied PhysicsComparative Micro-cantilever StudySemiconductor Device FabricationThin FilmsElectronic PackagingMicroelectronicsSilicon On InsulatorMicro-electromechanical SystemPassivation Films