Concepedia

Helmut Schönherr

HS

3

Publications

292

Citations

3

H-Index

2000

Active since

Affiliations

Infineon Technologies (Austria)(Current)

Montanuniversität Leoben

Österreichisches Forschungsinstitut für Chemie und Technik

Austrian Academy of Sciences

Erich Schmid Institute of Materials Science

Helmut Schönherr is an author at Infineon Technologies (Austria) specializing in applied physics, engineering, and microfabrication.

Top concepts

Publications per year

2000–2010

3

Publications

3

A comparative micro-cantilever study of the mechanical behavior of silicon based passivation films

Kurt Matoy, Helmut Schönherr, Thomas Detzel et al. · Thin Solid Films · 2009 · 254 citations

, , +11

Micron-sized fracture experiments on amorphous SiOx films and SiOx/SiNx multi-layers

Kurt Matoy, Helmut Schönherr, Thomas Detzel et al. · Thin Solid Films · 2010 · 23 citations

, , +8

Characterization of step coverage change in ultraviolet-transparent plasma enhanced chemical vapor deposition silicon nitride films

Jessica Anne Bierner, Mohan V. Jacob, Helmut Schönherr · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2000 · 15 citations

, , +14

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