Journal of Micromechanics and Microengineering · 1993 · 77 citations · 3 references
Natural SciencesMaterials EngineeringMaterials ScienceBiomaterialsMicrofabricationPolymer ChemistryConducting PolymersConductive PolymersMicrofabrication ProcessesPolymer Thin FilmsSacrificial Layer ProcessingTactile SensingArtificial Muscle MaterialsArtificial MusclesConjugated PolymersElectroactive PolymersFabricationLayer AdhesionLow-temperature ProcessingPolymer-based Artificial Muscles
Microfabrication techniques allow one to construct metal/polymer bilayers anchored at one end to a substrate and free to move at the other end. Electrically controlled 'fingers' were fabricated using the conducting polymer as an artificial muscle: doping and undoping the conjugated polymer causes a change in volume of this layer which results in bending of the bilayer. Grasping hands, fingers with sensing tips, and micropumps can be envisioned. Standing in the way of immediate fabrication are several materials challenges including layer adhesion, material compatibility, sacrificial layer improvement, and low-temperature processing techniques.
3
Electrochemical muscles: Micromachining fingers and corkscrews
Elisabeth Smela, Olle Inganäs, Qibing Pei et al. · Advanced Materials · 1993 · 129 citations