Applied Physics A · 1998 · 24 citations · 0 references
Natural SciencesMaterials EngineeringMaterials ScienceElectronic MaterialsOptical MaterialsThin FilmsHolographyOptical Thin FilmsThin Film Optical PropertiesThin-film DepositionThin-film MaterialsTransparent Conducting OxidesReactive SputteringSputter DepositionSputteringThin Film Recording MediaThin-film Oxides