Concepedia

Atomic layer controlled deposition of Al2O3 films using binary reaction sequence chemistry

A. W. Ott, Ken McCarley, J. W. Klaus, J. Douglas Way, Steven M. George

Applied Surface Science · 1996 · 130 citations · 34 references

DOI

Concepts

References

34

Surface chemistry of Al2O3 deposition using Al(CH3)3 and H2O in a binary reaction sequence

Anne C. Dillon, A. W. Ott, J. Douglas Way et al. · Surface Science · 1995 · 459 citations

, , +15

Molecular Layer Epitaxy

Jun‐ichi Nishizawa, Hitoshi Abe, Toru Kurabayashi · Journal of The Electrochemical Society · 1985 · 314 citations

, , +17

Growth of titanium dioxide thin films by atomic layer epitaxy

Mikko Ritala, Markku Leskelä, E. Nykänen et al. · Thin Solid Films · 1993 · 307 citations

, , +14

Atomic layer epitaxy

C. H. L. Goodman, M. Pessa · Journal of Applied Physics · 1986 · 294 citations

, , +17

Determination of pore size and pore size distribution

Shin‐ichi Nakao · Journal of Membrane Science · 1994 · 280 citations

, , +12