Advanced Materials · 2008 · 53 citations · 20 references
Selective EtchingEngineeringMetallic SwntsSo3 GasChemical EngineeringElectronic DevicesCarbon-based MaterialGas ReactionCarbon-based FilmsCarbon NanotubesMaterials ScienceNanotechnologyNanomanufacturingScalable MethodPlasma EtchingNanomaterialsApplied PhysicsSemiconductor SwntsNanotubes
A facile, scalable, and low-cost gas-treatment method for selectively etching semiconductor single-walled carbon nanotubes (SWNTs) is developed. Using SO3 gas as the etchant at a temperature of 400 °C, semiconductor SWNTs can be selectively and efficiently removed, and after this gas treatment samples enriched with metallic SWNTs can be obtained.
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