Improved performance of non-volatile memory with Au-Al2O3 core-shell nanocrystals embedded in HfO2 matrix

Abstract

In this paper, we demonstrate a charge trapping memory with Au-Al2O3 core-shell nanocrystals (NCs) embedded in HfO2 high-k dielectric. Transmission electron microscopy images clearly show the Au NCs surrounded by Al2O3 shells in the HfO2 matrix. Electrical measurements show a considerable memory window (3.6 V at ±8 V), low program/erase operation voltages, and good endurance. Particularly, data retention is improved both at room temperature and high temperature compared to the NC structure without shell. An energy band model is given for the improved retention characteristic. This Au-Al2O3 core-shell NCs memory device has a strong potential for future high-performance nonvolatile memory application.