Solar Energy Materials and Solar Cells · 2008 · 18 citations · 20 references
Natural SciencesMaterials EngineeringMaterials ScienceCondensed Matter PhysicsSemiconductor MaterialsThin FilmsChemical Vapor DepositionSemiconductor SurfacesSemiconductor Thin FilmsSilicon MaterialsThin Film Optical PropertiesThin-film MaterialsChemical Vapor Deposition MaterialsHydrogenated Amorphous SiliconLow-temperature DepositionPhysical Vapor Deposition MaterialsSilicon Chemical Vapor DepositionSilicon DioxideSilicon Thin FilmsSubstrate Temperature Effects
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Deposition of device quality, low <i>H</i> content amorphous silicon
A. H. Mahan, J. J. Carapella, B. P. Nelson et al. · Journal of Applied Physics · 1991 · 481 citations