Vacuum · 1990 · 99 citations · 1 references
Natural SciencesChemistryPhysicsAnalytical ChemistryInstrumentationSpectroscopyIonization ProcessesMass SpectrometrySecondary Ion Mass SpectrometrySecondary IonizationTime-of-flight Secondary Ion Mass Spectrometry
1
Effect of SiO2 surface chemistry on the oxidation of silicon
J. M. deLarios, Dah-Bin Kao, C. R. Helms et al. · Applied Physics Letters · 1989 · 40 citations
Natural Sciences, Materials Engineering, Materials Science +17