J. M. deLarios

Effect of SiO2 surface chemistry on the oxidation of silicon

J. M. deLarios, Dah-Bin Kao, C. R. Helms et al. · Applied Physics Letters · 1989 · 40 citations

Natural Sciences, Materials Engineering, Materials Science +17

Effect of silicon surface cleaning procedures on oxidation kinetics and surface chemistry

J. M. deLarios, C. R. Helms, Dah-Bin Kao et al. · Applied Surface Science · 1987 · 18 citations

Natural Sciences, Materials Engineering, Materials Science +16

The Effect of Aqueous Chemical Cleaning on Si (100) Dry Oxidation Kinetics

J. M. deLarios, Dah-Bin Kao, B. E. Deal et al. · Journal of The Electrochemical Society · 1991 · 13 citations

Natural Sciences, Materials Engineering, Materials Science +17

A Study of the Breakdown Testing of Thermal Silicon Oxides and the Efects of Preoxidation Surface Treatment

Dah-Bin Kao, J. M. deLarios, C. R. Helms et al. · Reliability physics · 1989 · 12 citations

Engineering, Materials Engineering, Materials Science +15

Parallel oxidation model for Si including both molecular and atomic oxygen mechanisms

J. M. deLarios, C. R. Helms, Dah-Bin Kao et al. · Applied Surface Science · 1989 · 10 citations

Natural Sciences, Chemistry, Materials Science +14