Applied Surface Science · 2008 · 58 citations · 27 references
EngineeringMaterials EngineeringMaterials ScienceNanomaterialsNanotechnologyPhotonicsEtching ProcessesLaser PhysicsLaser Surface ProcessingNanostructured SurfacesSurface ModificationEtchingLaser Surface NanostructuringNanofabrication Of Photonic StructuresNanostructuresSelective EtchingSub-wavelength PatterningSurface Etching
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