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Fabrication of sub-wavelength surface ripples and in-volume nanostructures by fs-laser induced selective etching

Materials SciencePhotonicsSub-wavelength Surface RipplesAdvanced Laser ProcessingEngineeringMicrofabricationApplied PhysicsLaser Processing TechnologyIn-volume NanostructuresNanofabricationLaser-assisted DepositionLaser-surface InteractionsPlasma EtchingOptoelectronicsNanolithography Method