Journal of Physics Conference Series · 2013 · 10 citations · 7 references
EngineeringElectrical EngineeringMechanical EngineeringMicroelectromechanical SystemsMicroelectronicsMicrofabricationElectromechanical Energy ConversionElectrostatic ActuationHigh-frequency Power ConversionMems DesignMems Energy HarvestingMems FabricationElectrostatic Energy HarvestingEnergy HarvestingEnergy Harvesting SystemsMicro-scale Energy HarvestingPower OutputSilicon-on-insulator ProcessingSilicon-on-insulator TechnologySurface Potential
A novel in-plane MEMS electret energy harvester with combined electrodes of overlapping-area-change and gap-closing types is proposed for large output power both at low and high vibration accelerations. An early prototype has been successfully micro-fabricated with the single layer silicon-on-insulator process. Soft-X-ray charging is employed to establish uniform surface potential around 60 V on vertical electrets on the sidewall of the comb fingers. Up to 1.19 μW output power has been obtained at 552 Hz and 2.15 g acceleration oscillations, which corresponds to the effectiveness as high as 27.2%.
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