Concepedia

Comparison of diamond-like carbon film deposition by electron cyclotron resonance with benzene and methane

Paul Andry, P. W. Pastel, W. J. Varhue

Journal of materials research/Pratt's guide to venture capital sources · 1996 · 40 citations · 31 references

DOI

Concepts

References

31

Electronic and atomic structure of amorphous carbon

J. David Robertson, Eoin P. O’Reilly · Physical review. B, Condensed matter · 1987 · 1.4K citations

, , +17

Use of Raman scattering to investigate disorder and crystallite formation in as-deposited and annealed carbon films

R. O. Dillon, John A. Woollam, V. Katkanant · Physical review. B, Condensed matter · 1984 · 1.1K citations

, , +14

Optical emission spectroscopy of reactive plasmas: A method for correlating emission intensities to reactive particle density

J. W. Coburn, Min Chen · Journal of Applied Physics · 1980 · 880 citations

, , +16

Characterization of diamondlike carbon films and their application as overcoats on thin-film media for magnetic recording

Hsiao‐chu Tsai, David B. Bogy · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1987 · 851 citations

, , +14

Hard amorphous (diamond-like) carbons

John Robertson · Progress in Solid State Chemistry · 1991 · 786 citations

, , +9