W. J. Varhue

Silicon dioxide films deposited by electron cyclotron resonance plasma enhanced chemical vapor deposition

Robert Andosca, W. J. Varhue, Ellen Adams · Journal of Applied Physics · 1992 · 50 citations

Materials Science, Fourier Transform, Engineering +10

Comparison of diamond-like carbon film deposition by electron cyclotron resonance with benzene and methane

Paul Andry, P. W. Pastel, W. J. Varhue · Journal of materials research/Pratt's guide to venture capital sources · 1996 · 40 citations

Materials Science, Diamond-like Carbon, Engineering +7

Epitaxial film thickness in the low-temperature growth of Si(100) by plasma enhanced chemical vapor deposition

W. J. Varhue, J. L. Rogers, Paul Andry et al. · Applied Physics Letters · 1996 · 32 citations

Materials Science, Materials Engineering, Electrical Engineering +15

The effect of radio frequency substrate biasing in the deposition of diamond-like carbon films in an electron cyclotron resonance discharge

P. W. Pastel, W. J. Varhue · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1991 · 31 citations

Diamond-like Carbon, Electrical Engineering, Optical Materials +13

Deposition of Y2O3 by plasma enhanced organometallic chemical vapor deposition using an electron cyclotron resonance source

W. J. Varhue, Maurice Massimo, J. M. Carrulli et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1993 · 26 citations

Materials Science, Materials Engineering, Chemical Engineering +15