Sensors and Actuators A Physical · 2007 · 23 citations · 14 references
EngineeringMechanical EngineeringMicroelectromechanical SystemsMicrofabricationVibrationBeam TheoryFree VibrationMems ResonatorsNonlinear MechanicsNonlinear VibrationBeam Free VibrationBeam MechanicsFree Vibration ResponseNonlinear Free VibrationNonlinear Resonators
14
Ali H. Nayfeh, Dean T. Mook, Phillip Holmes · Journal of Applied Mechanics · 1980 · 4.7K citations
Nonlinear Limits for Single-Crystal Silicon Microresonators
V. Kaajakari, T. Mattila, A. Oja et al. · Journal of Microelectromechanical Systems · 2004 · 397 citations