Structures of (C<sub>5</sub>H<sub>5</sub>N)<sub>3</sub>Al(N<sub>3</sub>)<sub>3</sub>, [Me<sub>2</sub>N(CH<sub>2</sub>)<sub>3</sub>]<sub>2</sub>Al(N<sub>3</sub>) and Me<sub>2</sub>(N<sub>3</sub>)Al(H<sub>2</sub>NBu<sup>t</sup>). Low-temperature OMVPE of AlN in the absence of ammonia

Roland A. Fischer, Alexander Miehr, H. Sussek, Hans Pritzkow, Eberhardt Herdtweck, Jens Müller, O. Ambacher, Thomas Metzger

Chemical Communications · 1996 · 31 citations · 10 references

Concepts

Abstract

New Lewis-base stabilized monomeric azido alanes are synthesized by salt metathesis from the corresponding chloro alanes and an excess of sodium azide; thin films of crystalline AlN are grown by OMVPE at 400–850 °C in vacuo.

References

10