Concepedia

High power generators for medium frequency sputtering applications

Thomas Rettich, P. Wiedemuth

Journal of Non-Crystalline Solids · 1997 · 13 citations · 1 references

DOI

Concepts

References

1

Pulsed magnetron sputter technology

S. Schiller, K. Goedicke, J. Reschke et al. · Surface and Coatings Technology · 1993 · 338 citations

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