Concepedia

Synthesis and SAW characteristics of AlN thin films fabricated on Si and GaN using helicon sputtering system

Sheng-Wen Chen, H.F. Lin, Taehyun Sung, Jia‐Ren Wu, Hui-Ling Kao, J.S. Chen

Electronics Letters · 2003 · 10 citations · 5 references

Concepts

EngineeringMaterials EngineeringMaterials ScienceSemiconductor DevicesSemiconductor MaterialsThin FilmsSemiconductor Device MaterialsSemiconductor SurfacesSemiconductor Thin FilmsThin Film EtchingThin-film DepositionThin-film MaterialsAluminum Gallium NitrideAluminum NitrideAluminum Nitride DevicesGallium Nitride (Gan) MaterialsNitride Thin FilmsNitrides Thin Films

Abstract

High quality AlN films have been obtained on SiO2/Si and GaN/Sapphire using the helicon sputtering method. Fabrication of the thin film layered structure surface acoustic wave (SAW) devices has been demonstrated and the promising characteristics are presented.

References

5

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Suk-Hun Lee, Hwan-Hee Jeong, Sung‐Bum Bae et al. · IEEE Transactions on Electron Devices · 2001 · 81 citations

Engineering, Electrical Engineering, Materials Science +16

The Study of Preferred Orientation Growth of Aluminum Nitride Thin Films on Ceramic and Glass Substrates

Hui-Ling Kao, P. J. Shih, Chun-Hsi Lai · Japanese Journal of Applied Physics · 1999 · 46 citations

Natural Sciences, Materials Engineering, Materials Science +15

Piezoelectric AlN film for SAW devices applications

Cinzia Caliendo, Giovanni Saggio, P. Verardi et al. · 1993 · 20 citations

Natural Sciences, Materials Engineering, Materials Science +17

Optimizing surface acoustic wave sensors for trace chemical detection

G.C. Frye, Richard Joseph Kottenstette, Edwin J. Heller et al. · 2002 · 14 citations

Engineering, Materials Engineering, Materials Science +16

High frequency SAW filter on diamond

K. Higaki, H. Nakahata, H. Kitabayashi et al. · 2002 · 14 citations

Engineering, Electrical Engineering, Materials Science +12