Concepedia

Publication | Closed Access

Plasma and particle flux characterization of the a-C:H deposition process by ion-assisted methods

DOI

12

Citations

7

References

1991

Year

G. Schaarschmidt, Frank Scholze, S. Porsch, Franziska M. Wolf, T. Wallendorf, W. Scharff, Julia Gerber, R. Kleber, W. Dworschak, A. Krüger,
Materials Science and Engineering A

References

YearCitations

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