Structural macro-defects in 6H-SiC wafers - Concepedia

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Structural macro-defects in 6H-SiC wafers

76

Citations

9

References

1993

Year

R Glass, Lars Kjellberg, V. F. Tsvetkov, J.‐E. Sundgren, Erik Janzén

Journal of Crystal Growth

Materials ScienceMaterials EngineeringEngineeringStructural Macro-defectsDefect FormationDefect ToleranceCarbide

References

	Year	Citations

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