Journal of Crystal Growth · 1993 · 76 citations · 9 references
Natural SciencesMaterials EngineeringMaterials ScienceElectronic MaterialsSemiconductor DevicesSemiconductor MaterialsDefect CharacterizationDefectsDefects In Electronic MaterialsSemiconductor DefectsSemiconductor ReliabilityStacking FaultsSilicon CarbideSilicon Carbide (Sic) MaterialsSilicon DefectsSilicon WafersStructural Defects
9