Surface and Coatings Technology · 2010 · 10 citations · 45 references
Natural SciencesMaterials EngineeringMaterials ScienceElectronic MaterialsSemiconductor MaterialsThin FilmsThin Film Electrical PropertiesThin-film DepositionThin-film MaterialsX-ray Photoelectron SpectroscopyArc DischargesArc Plasma Physics
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Steven D. Bass · The European Physical Journal A · 1999 · 1.2K citations · Full text
WNx diffusion barriers between Si and Cu
Masaki Uekubo, Takeo Oku, Kazushi Nii et al. · Thin Solid Films · 1996 · 142 citations