Masaki Uekubo is an author at Kyoto University specializing in applied physics, physics, and engineering.
Top concepts
Publications per year
1996–1996
2
2
Diffusion barrier property of TaN between Si and Cu
Takeo Oku, Eiji Kawakami, Masaki Uekubo et al. · Applied Surface Science · 1996 · 240 citations
WNx diffusion barriers between Si and Cu
Masaki Uekubo, Takeo Oku, Kazushi Nii et al. · Thin Solid Films · 1996 · 140 citations
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