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Mechanical behavior of a circular micro plate subjected to uniform hydrostatic and non-uniform electrostatic pressure

EngineeringSoft RoboticsMicromechanicsMicrofabricationMechanical BehaviorMechanicsMechanical EngineeringSolid MechanicsNon-uniform Electrostatic PressureMicroactuatorMicrofluidicsCircular Micro PlateMechanics Of MaterialsMicro-electromechanical System