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Application of piezoelectric layers in electrostatic MEM actuators: controlling of pull-in voltage

Piezoelectric LayersElectrical EngineeringEngineeringMicrofabricationMechanical EngineeringMechatronicsMechanical SystemsPull-in VoltageElectrostatic Mem ActuatorsActuationPiezoelectricityPiezoelectric MaterialMicroactuatorMicroelectronicsMicro-electromechanical System