Thin Solid Films · 2003 · 31 citations · 14 references
EngineeringMaterials EngineeringMaterials ScienceMicroelectromechanical SystemsMicrofabricationThin FilmsMems MaterialsMicrofabrication MaterialsMicrofabrication ProcessesMicromachiningThin-film DepositionThin-film MaterialsThin Film Deposition Materials
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Review of the tribology of diamond-like carbon
Frictional properties of diamondlike carbon layers
K. Enke, H. Dimigen, H. Hübsch · Applied Physics Letters · 1980 · 301 citations