Classical and Quantum Gravity · 2009 · 57 citations · 27 references
Low-temperature Dissipation PeakThin Film PhysicsEngineeringMechanical EngineeringTemperature DependenceThin Film Process TechnologyThermal ConductivityOptical PropertiesThermodynamicsThermal ConductionThin Film ProcessingMaterials SciencePhysicsDepth-graded Multilayer CoatingMaterial AnalysisNatural SciencesSurface ScienceApplied PhysicsThin FilmsThermal EngineeringOptoelectronicsThermal PropertyMechanical Dissipation
Here we report the first results comparing the temperature dependence of the mechanical dissipation in thin films of Ta_2O_5 and Ta_2O_5 doped with TiO_2, of a type suitable for use in the multilayer optical coatings for advanced gravitational wave detectors. The results indicate that doping Ta_2O_5 with TiO_2 can significantly alter the distribution of activation energies associated with the low-temperature dissipation peak.
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Quality factors in micron- and submicron-thick cantilevers
Kevin Yasumura, T. D. Stowe, Eugene M. Chow et al. · Journal of Microelectromechanical Systems · 2000 · 669 citations