Characterization of Al2O3 thin films prepared by spray pyrolysis method for humidity sensor

Studies on optical and dielectric properties of Al2O3 thin films prepared by electron beam evaporation and spray pyrolysis method

K. S. Shamala, L.C.S. Murthy, K. Narasimha Rao · Materials Science and Engineering B · 2003 · 183 citations

Materials Science, Dielectric Properties, Aluminium Nitride +11

Study of the performance degradation of thin film aluminum oxide sensor at high humidity

R.K. Nahar · Sensors and Actuators B Chemical · 2000 · 116 citations

Chemical Engineering, Electrical Engineering, High Humidity +9

Optical and electrical properties of aluminum oxide films deposited by spray pyrolysis

M. Aguilar‐Frutis, Mario E. Rodríguez‐García, C. Falcony · Applied Physics Letters · 1998 · 100 citations

Materials Science, Water Mist, Optical Materials +14

Ionic doping and inversion of the characteristic of thin film porous Al2O3 humidity sensor

R.K. Nahar, V. K. Khanna · Sensors and Actuators B Chemical · 1998 · 76 citations

Materials Science, Engineering, Oxide Electronics +6

A study of the dielectric characteristics of aluminum oxide thin films deposited by spray pyrolysis from Al(acac)3

M. Aguilar‐Frutis, Mario E. Rodríguez‐García, C. Falcony et al. · Thin Solid Films · 2001 · 72 citations

Materials Science, Materials Engineering, Aluminium Nitride +7