A study of the dielectric characteristics of aluminum oxide thin films deposited by spray pyrolysis from Al(acac)3 - Concepedia

Concepedia

Publication | Closed Access

A study of the dielectric characteristics of aluminum oxide thin films deposited by spray pyrolysis from Al(acac)3

72

Citations

21

References

2001

Year

M. Aguilar‐Frutis, Mario E. Rodríguez‐García, C. Falcony, G. Plesch, S. Jiménez‐Sandoval

Thin Solid Films

Materials ScienceMaterials EngineeringAluminium NitrideEngineeringSurface ScienceApplied PhysicsThin FilmsSpray PyrolysisThin Film ProcessingDielectric Characteristics

References

	Year	Citations

Page 1