Effects of UV light irradiation and excess Zn addition on ZnO:Al film properties in sputtering process

Kikuo Tominaga, N. Umezu, I. Mori, T. Ushiro, Toshihiro Moriga, Ichiro Nakabayashi

Thin Solid Films · 1998 · 13 citations · 7 references

Concepts

References

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