Generation of electron cyclotron resonance plasmas using a circular TE01 mode microwave

Abstract

An electron cyclotron resonance plasma using a circular TE01 mode microwave is generated to achieve larger diameters. It is shown that the input power of the circular TE01 mode is efficiently consumed to generate electron cyclotron resonance plasmas. The density and temperature of electrons is around 1012 cm−3 and 3–5 eV at 5 kW input power, respectively.