Hot pulling and embossing of hierarchical nano- and micro-structures

Abstract

Hot embossing and pulling techniques are presented allowing the fabrication of hierarchical micro- and nano-structures. By utilizing demolding forces we replicate nanopillars with high aspect ratio (AR of 10) and small diameters (200 nm). Furthermore, we draw a dense nanofur either with defined or random design. Introducing a electromechanical sensor system we subsequently fabricated a threefold hierarchical structure. Using these replication techniques tiny hairs for bio-inspired designs can be realized with short cycle times and high scalability.