Electronics Letters · 2002 · 30 citations · 5 references
EngineeringElectrical EngineeringMaterials ScienceOptoelectronicsPhotonicsSemiconductor DevicesEtching ProcessesIntegrated PhotonicsLaser DiodesPhotonic Integrated CircuitsPolarization OpticsSemiconductor LasersDevice FabricationPolarization ManagementPolarization PropertiesSemiconductor Laser FabricationSurface EtchingSurface ReliefVertical-cavity Surface-emitting Lasers
850 nm-wavelength vertical-cavity surface-emitting lasers (VCSELs) with an elliptical shallow surface relief having various aspect ratios and orientations have been fabricated. Using appropriate etch dimensions, VCSELs of up to 12.5 µm active diameter are forced to operate on the fundamental mode for a certain current range. By aligning the longer axis of the etched ellipse with the [011] or [011] crystal axis, the polarisation of the fundamental mode is pinned accordingly with a polarisation suppression ratio of ∼30 dB.
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C.-A. Berseth, B. Dwir, Ivo Utke et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1999 · 25 citations · Full text