Deposition and characterization of titanium carbide thin films by magnetron sputtering using Ti and TiC targets

An improved technique for determining hardness and elastic modulus using load and displacement sensing indentation experiments

W. C. Oliver, George M. Pharr · Journal of materials research/Pratt's guide to venture capital sources · 1992 · 26.6K citations

Natural Sciences, Materials Engineering, Materials Science +16

X-ray diffraction procedures

Harold P. Klug, Leroy Alexander · CERN Document Server (European Organization for Nuclear Research) · 1954 · 4.2K citations

Reactive-sputter-deposited TiN films on glass substrates

Joshua Pelleg, Levy Zevin, S. Lungo et al. · Thin Solid Films · 1991 · 744 citations

Natural Sciences, Materials Engineering, Materials Science +14

Development of preferred orientation in polycrystalline TiN layers grown by ultrahigh vacuum reactive magnetron sputtering

J. E. Greene, J.‐E. Sundgren, Lars Hultman et al. · Applied Physics Letters · 1995 · 395 citations

Natural Sciences, Materials Engineering, Materials Science +15

Mechanisms of reactive sputtering of titanium nitride and titanium carbide II: Morphology and structure

J.‐E. Sundgren, B.-O. Johansson, Susanne Karlsson et al. · Thin Solid Films · 1983 · 275 citations

Natural Sciences, Materials Engineering, Materials Science +16