Ablative thresholds in laser cleaning of substrates from particulates

Local field enhancement effects for nanostructuring of surfaces

H. Münzer, M. Mosbacher, M. Bertsch et al. · Journal of Microscopy · 2001 · 158 citations · Full text

Natural Sciences, Materials Engineering, Materials Science +16

Laser-assisted removal of particles on silicon wafers

Guy Vereecke, E. Röhr, Marc Heyns · Journal of Applied Physics · 1999 · 103 citations · Full text

Engineering, Materials Engineering, Materials Science +17

Three-dimensional effects in dry laser cleaning

Boris Luk’yanchuk, N. Arnold, S-M Huang et al. · Applied Physics A · 2003 · 95 citations

Engineering, Materials Engineering, Materials Science +14

Laser cleaning of solid surface: optical resonance and near-field effects

Boris Luk’yanchuk · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2000 · 74 citations

Natural Sciences, Materials Science, Physics +17

Theoretical description of dry laser cleaning

N. Arnold · Applied Surface Science · 2003 · 74 citations

Natural Sciences, Materials Science, Physics +14