Applied Physics A · 2003 · 95 citations · 0 references
EngineeringMaterials EngineeringMaterials ScienceMicrofabricationOpticsSurface EngineeringCleanroom ProcessingLaser Material ProcessingLaser OpticsLaser PhysicsLaser Surface ProcessingSurface CleaningDry CleaningLaser Surface CleaningLaser Surface TreatmentLaser Surface Treatment MechanismsThermal Effects In Laser Processing