Concepedia

Growth and Characterisation of Pb(Zr,Ti)O<inf>3</inf>Films Deposited by Reactive Sputtering of Metallic Targets

A. Croteau, M. Sayer

1986 · 10 citations · 8 references

DOI

Concepts

References

8

Elements of X-ray Diffraction

E. D. T. Atkins · Physics Bulletin · 1978 · 7.1K citations

, , +9

Theory of Sputtering. I. Sputtering Yield of Amorphous and Polycrystalline Targets

Peter Sigmund · Physical Review · 1969 · 3.5K citations

, , +13

Theory of Sputtering. I. Sputtering Yield of Amorphous and Polycrystalline Targets

Peter Sigmund · Physical Review · 1969 · 792 citations

, , +13

rf planar magnetron sputtering and characterization of ferroelectric Pb(Zr,Ti)O3 films

S. B. Krupanidhi, N. Maffei, M. Sayer et al. · Journal of Applied Physics · 1983 · 217 citations

, , +17

Theoretical studies on an empirical formula for sputtering yield at normal incidence

Y. Yamamura, N. Matsunami, Noriaki Itoh · Radiation Effects · 1983 · 156 citations

, , +7