A tunable, double-wavelength heterodyne detection interferometer with frequency-locked diode-pumped Nd:YAG sources for absolute measurements

Abstract

A double heterodyne interferometric instrument using a tunable synthetic wavelength for the absolute measurements of distance and position is presented. The optical synthetic wavelength is generated by a pair of PZT-tunable diode-pumped Nd:YAG lasers operating at 1.064 μm. Based on a closed-loop scheme, a suitable electronic circuit has been developed to implement the frequency locking of the two lasers. A digital frequency comparator provides an error signal, used to control the slave laser, by comparing the laser beat frequency to a reference oscillator. Demodulation of the superheterodyne signals is obtained by a rf detector followed by low-pass filtering. Distance measurements are obtained by a digital phase meter gauging the phase difference between the demodulated signals from a measuring interferometer and from a reference interferometer. The paper presents the optical and the electronic layouts of the instrument as well as experimental results from a laboratory prototype.