Applied Surface Science · 1992 · 10 citations · 22 references
Natural SciencesMaterials EngineeringMaterials ScienceMaterials ChemistryPlasma PhysicsSurface ScienceMagnetized PlasmaPlasma Surface TreatmentPlasma-wall InteractionsPlasma DepositionPlasma-assisted SynthesisPlasma-enhanced Deposition
22