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Characteristics of Al-doped ZnO thin films obtained by ultrasonic spray pyrolysis: effects of Al doping and an annealing treatment

Materials ScienceMaterials EngineeringAluminium NitrideAnnealing TreatmentEngineeringNanotechnologyOxide ElectronicsApplied PhysicsUltrasonic Spray PyrolysisThin FilmsThin Film Processing