Internet-based surface metrology algorithm testing system

Numerical recipes in C

William H. Press, Saul A. Teukolsky, William T. Vetterling et al. · 1994 · 15.3K citations

Mathematical Programming, Numerical Analysis, Electrical Engineering +11

Self-sorting mixed-radix fast Fourier transforms

Clive Temperton · Journal of Computational Physics · 1983 · 171 citations

Engineering, Multidimensional Signal Processing, Sorting Algorithm +3

A fast algorithm for determining the Gaussian filtered mean line in surface metrology☆

Y B. Yuan, Xifu Qiang, Jieru Song et al. · Precision Engineering · 2000 · 47 citations

Numerical Analysis, Geometric Modeling, Surface Metrology☆ +12

Power spectral densities: A multiple technique study of different Si wafer surfaces

Egon Marx, Igor J. Malik, Y. E. Strausser et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2002 · 36 citations

Wafer Surfaces, Engineering, Silicon On Insulator +20

Ambiguities in the definition of spacing parameters for surface-texture characterization

Richard Leach, P M Harris · Measurement Science and Technology · 2002 · 27 citations

Geometric Modeling, Parameter Rsm, Engineering +15