The International Journal of Advanced Manufacturing Technology · 2000 · 13 citations · 1 references
EngineeringManufacturing EngineeringMaterials ScienceMaterials ProcessingMicroelectromechanical SystemsMicrofabricationBulk MicromachiningMicrofabrication ProcessesMicrofluidic Device FabricationMicrofluidicsPattern TransferSubstrate PreparationComputer-aided Manufacturing File FormatsFile Format Conversion
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