CIRP journal of manufacturing science and technology · 2008 · 70 citations · 11 references
EngineeringManufacturing EngineeringMaterials EngineeringMicrofabricationSurface EngineeringSurface ScienceMachiningMicrofabrication ProcessesMicromachiningSurface FinishingSurface MicromachiningSurface ModificationElectrochemical Surface EngineeringHigh-aspect-ratio Surface StructuresJet MillingSurface Finish ImprovementThree-dimensional Surface Topography
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