Applied Physics A · 2004 · 17 citations · 16 references
EngineeringMaterials EngineeringMaterials ScienceMicroelectronicsMicrofabricationLaser Material ProcessingLaser PhysicsMems ModelingMicrofabrication MaterialsMicrostructure ControlAblation PhysicsBlack-body RadiationLaser AblationLaser MicromachiningMaterial Ablation
16
Microstructuring of silicon with femtosecond laser pulses
Tsing-Hua Her, Richard Finlay, Claudia Wu et al. · Applied Physics Letters · 1998 · 807 citations
Near-unity below-band-gap absorption by microstructured silicon
Chengbin Wu, Catherine H. Crouch, Li Zhao et al. · Applied Physics Letters · 2001 · 511 citations
Femtosecond laser-induced formation of spikes on silicon
Tsing-Hua Her, Richard Finlay, Chengkun Wu et al. · Applied Physics A · 2000 · 239 citations
Formation of conical microstructures upon laser evaporation of solids
Sergei I Dolgaev, S. V. Lavrishev, A.A. Lyalin et al. · Applied Physics A · 2001 · 128 citations