Phase Modulation Microscope MIM-2.1 for Measurements of Surface Microrelief. Results of Measurements

V. A. Andreev, K. V. Indukaev, O. K. Ioselev, A. I. Legkii, Grigory Lazarev, D. A. Orlov

Journal of Russian Laser Research · 2005 · 11 citations · 3 references

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