Concepedia

Self-limiting growth of ZnO films on (0001) sapphire substrates by atomic layer deposition at low temperatures using diethyl-zinc and nitrous oxide

Yen-Ting Lin, Ping-Han Chung, Hung-Wei Lai, Hsin-Lun Su, Dong-Yuan Lyu, Kuo-Yi Yen, Tai‐Yuan Lin, Chung‐Yuan Kung, Jyh-Rong Gong

Applied Surface Science · 2009 · 20 citations · 14 references

DOI

Concepts

References

14

Catalytic Growth of Zinc Oxide Nanowires by Vapor Transport

Michael H. Huang, Yijing Wu, H. Feick et al. · Advanced Materials · 2001 · 2.7K citations

, , +11

Extremely low temperature growth of ZnO by atomic layer deposition

E. Guziewicz, I.A. Kowalik, M. Godlewski et al. · Journal of Applied Physics · 2008 · 241 citations

, , +17

Buffer-enhanced room-temperature growth and characterization of epitaxial ZnO thin films

Atsushi Sasaki, Wakana Hara, Akifumi Matsuda et al. · Applied Physics Letters · 2005 · 75 citations

, , +17

Preparation and properties of ZnO:Ga films prepared by r.f. magnetron sputtering at low temperature

Xuhu Yu, Jin Ma, Feng Ji et al. · Applied Surface Science · 2004 · 69 citations

, , +14

Epitaxial growth of ZnO films on lattice-matched ScAlMgO4(0001) substrates

Kentaro Tamura, Akira Ohtomo, K. Saikusa et al. · Journal of Crystal Growth · 2000 · 68 citations

, , +16