Reduction of sidewall roughness in silicon-on-insulator rib waveguides

Fabrication of ultralow-loss Si/SiO_2 waveguides by roughness reduction

Kevin C. Lee, Desmond R. Lim, Lionel C. Kimerling et al. · Optics Letters · 2001 · 559 citations

Engineering, Electrical Engineering, Materials Science +17

Introduction to surface roughness and scattering

Choice Reviews Online · 1990 · 545 citations

Natural Sciences, Materials Engineering, Materials Science +10

A theoretical analysis of scattering loss from planar optical waveguides

F.P. Payne, J.P.R. Lacey · Optical and Quantum Electronics · 1994 · 533 citations

Engineering, Electrical Engineering, Materials Science +14

Recent advances in silicon etching for MEMS using the ASE™ process

A. Hynes, Hamza Ashraf, Jy Bhardwaj et al. · Sensors and Actuators A Physical · 1999 · 178 citations

Engineering, Electrical Engineering, Materials Science +14

Size Influence on the Propagation Loss Induced by Sidewall Roughness in Ultrasmall SOI Waveguides

Frédéric Grillot, Laurent Vivien, S. Laval et al. · IEEE Photonics Technology Letters · 2004 · 160 citations

Engineering, Electrical Engineering, Optics +16